Probe station is mainly used in semiconductor industry, photoelectric industry, integrated circuit and packaging test. It is widely used in the research and development of precision electrical measurement of complex high-speed devices, aiming at ensuring quality and reliability and reducing research and development time and device manufacturing process cost.
X-y table classification of probe test table
The function and composition of automatic probe testing table at home and abroad are similar, that is, it is mainly composed of x-y worktable, programmable wafer bearing table, card probe/card probe holder, sample spotter, edge detector, operating handle and so on. , and is equipped with a communication interface connected with the tester.
However, according to the different structure of x-y table, it can be divided into two categories, namely, planar motor x-y table (also known as magnetic air bearing table) automatic probe test table represented by American EG company, and x-y table automatic probe test table with precision ball screw pair and linear guide rail structure made in Japan and European countries.
Because the structure of x-y worktable is very different, its use and maintenance can't be generalized, so it should be treated differently.